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Grouped equipment

Wafer Cleaning

Main features:

1.A variety of cleaning mode, optional two fluid cleaning, nitrogen cleaning, ultra high pressure cleaning and other modes;

2.Suitable for blue tape、UV tape、PET substrate and double layer tape

3.PLC full automatic control, touch control operation, parameter and cleaning mode intelligent editing, simple and convenient operation.

4. Adopt aviation industry sealing technology, safe and reliable

5. Adopt centrifugal automatic grasping and locking device

6. Equipped with 7-inch color touch screen, cleaning parameters and alarm information are clear


Application:

mainly used in the industry of material preparation, solar cell chip, discrete device and so on Eight The cutting and drying process of the wafer or device after the cutting.


Detail:

model

HCS600

HCS800

work size

6inch

8inch

work table

Microporous ceramic vacuum table

cleaning water pressure

pure water  0.2-0.4Mpa

flow

0.4-0.5 L/min

Nitrogen blowing pressure

0.3-0.4Mpa

Compressed Air

0.5Mpa    clean dry compressed air

Dimensions

420x740x1410 mm

420x740x1410 mm

weight

150Kg

150Kg



+86-024-81866018
No. 19 Hunnan East Road, Hunnan New District, Shenyang, Liaoning Province, China
CONTACT US
+86-024-81866018
No. 19 Hunnan East Road, Hunnan New District, Shenyang, Liaoning Province, China
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